ABLATIVE PHOTODECOMPOSITION OF POLYMERS

被引：11

作者：

GARRISON, BJ ^{[1
]}

SRINIVASAN, R ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573299

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：746 / 748

页数：3

共 15 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].

ANDREW, JE ;

DYER, PE ;

FORSTER, D ;

KEY, PH .

APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719

[2] SPECTROSCOPIC STUDIES OF ARF LASER PHOTOABLATION OF PMMA [J].

DAVIS, GM ;

GOWER, MC ;

FOTAKIS, C ;

EFTHIMIOPOULOS, T ;

ARGYRAKIS, P .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 36 (01) :27-30

[3] SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J].

DEUTSCH, TF ;

GEIS, MW .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :7201-7204

[4] EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].

DYER, PE ;

SIDHU, J .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422

[5] LASER ABLATION OF ORGANIC POLYMERS - MICROSCOPIC MODELS FOR PHOTOCHEMICAL AND THERMAL-PROCESSES [J].

GARRISON, BJ ;

SRINIVASAN, R .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :2909-2914

[6] MICROSCOPIC MODEL FOR THE ABLATIVE PHOTODECOMPOSITION OF POLYMERS BY FAR-ULTRAVIOLET RADIATION (193 NM) [J].

GARRISON, BJ ;

SRINIVASAN, R .

APPLIED PHYSICS LETTERS, 1984, 44 (09) :849-851

[7] SELF-DEVELOPING RESIST WITH SUBMICROMETER RESOLUTION AND PROCESSING STABILITY [J].

GEIS, MW ;

RANDALL, JN ;

DEUTSCH, TF ;

DEGRAFF, PD ;

KROHN, KE ;

STERN, LA .

APPLIED PHYSICS LETTERS, 1983, 43 (01) :74-76

[8] EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS [J].

KOREN, G ;

YEH, JTC .

APPLIED PHYSICS LETTERS, 1984, 44 (12) :1112-1114

[9] FAR-ULTRAVIOLET LASER ABLATION OF ATHEROSCLEROTIC LESIONS [J].

LINSKER, R ;

SRINIVASAN, R ;

WYNNE, JJ ;

ALONSO, DR .

LASERS IN SURGERY AND MEDICINE, 1984, 4 (02) :201-206

[10] ABLATIVE PHOTO-DECOMPOSITION - ACTION OF FAR ULTRAVIOLET (193-NM) LASER-RADIATION ON POLY(ETHYLENE-TEREPHTHALATE) FILMS [J].

SRINIVASAN, R ;

LEIGH, WJ .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1982, 104 (24) :6784-6785

← 1 2 →