INTERACTION OF DEUTERIUM GAS WITH DRY SIO2 ON SI - AN ION-BEAM STUDY

被引：57

作者：

MYERS, SM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 12期

关键词：

D O I：

10.1063/1.338284

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5428 / 5437

页数：10

共 35 条

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