OPTICAL CHARACTERIZATION OF POLYCRYSTALLINE SILICON BEFORE AND AFTER THERMAL-OXIDATION

被引：12

作者：

MONTAUDON, P

DEBROUX, MH

FERRIEU, F

VAREILLE, A

机构：

来源：

THIN SOLID FILMS | 1985年 / 125卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90227-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：235 / 241

页数：7

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