EFFECT OF RECYCLING ON THE AXIAL DISTRIBUTION OF COATING THICKNESS IN A LOW-PRESSURE CVD REACTOR

被引：8

作者：

COLLINGHAM, ME ^{[1
]}

ZOLLARS, RL ^{[1
]}

机构：

[1] WASHINGTON STATE UNIV,DEPT CHEM ENGN,PULLMAN,WA 99164

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 03期

关键词：

D O I：

10.1149/1.2096745

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：787 / 794

页数：8

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