DOPING OF DIAMOND

被引：9

作者：

OKANO, K

KIYOTA, H

KUROSU, T

IIDA, M

机构：

[1] Department of Electronics, School of Engineering, Tokai University, Hiratsuka, Kanagawa, 259-12

来源：

关键词：

D O I：

10.1016/0925-9635(94)90027-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Semiconducting diamond films were deposited by the conventional hot filament chemical vapour deposition technique. Boron trioxide and diphosphorus pentaoxide have been used as the dopants for p- and n-type films respectively. The films obtained were identified as diamond by means of scanning electron microscopy, electron diffraction and Raman spectroscopy. The impurity concentrations in the films were evaluated using secondary ion mass spectroscopy. The semiconducting properties of the films were confirmed by measuring the resistivity, the Hall effect and the activation energy of the conductivity.

引用

页码：35 / 40

页数：6

共 13 条

[1] UNUSUAL PHOSPHORESCENCE OF A DIAMOND [J].

CUSTERS, JFH .

PHYSICA, 1952, 18 (8-9) :489-496

[2]

FIELD JE, 1973, PROPERTIES DIAMOND, P99

[3] CHARACTERIZATION OF CONDUCTING DIAMOND FILMS [J].

FUJIMORI, N ;

IMAI, T ;

DOI, A .

VACUUM, 1986, 36 (1-3) :99-102

[4]

GEIS MW, 1990, DIAMOND SIC RELATED, V162, P15

[5] SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS [J].

HIROSE, Y ;

TERASAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06) :L519-L521

[6] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE [J].

MATSUMOTO, S ;

SATO, Y ;

KAMO, M ;

SETAKA, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04) :L183-L185

[7] P-N-JUNCTION DIODE MADE OF SEMICONDUCTING DIAMOND FILMS [J].

OKANO, K ;

KIYOTA, H ;

IWASAKI, T ;

KUROSU, T ;

IIDA, M ;

NAKAMURA, T .

APPLIED PHYSICS LETTERS, 1991, 58 (08) :840-841

[8] FABRICATION OF A DIAMOND P-N-JUNCTION DIODE USING THE CHEMICAL VAPOR-DEPOSITION TECHNIQUE [J].

OKANO, K ;

KIYOTA, H ;

IWASAKI, T ;

NAKAMURA, Y ;

AKIBA, Y ;

KUROSU, T ;

IIDA, M ;

NAKAMURA, T .

SOLID-STATE ELECTRONICS, 1991, 34 (02) :139-141

[9] SYNTHESIS OF N-TYPE SEMICONDUCTING DIAMOND FILM USING DIPHOSPHORUS PENTAOXIDE AS THE DOPING SOURCE [J].

OKANO, K ;

KIYOTA, H ;

IWASAKI, T ;

NAKAMURA, Y ;

AKIBA, Y ;

KUROSU, T ;

IIDA, M ;

NAKAMURA, T .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 51 (04) :344-346

[10] SYNTHESIS OF DIAMOND THIN-FILMS HAVING SEMICONDUCTIVE PROPERTIES [J].

OKANO, K ;

NARUKI, H ;

AKIBA, Y ;

KUROSU, T ;

IIDA, M ;

HIROSE, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (02) :L173-L175

← 1 2 →