FABRICATION OF A DIAMOND P-N-JUNCTION DIODE USING THE CHEMICAL VAPOR-DEPOSITION TECHNIQUE

被引:20
作者
OKANO, K
KIYOTA, H
IWASAKI, T
NAKAMURA, Y
AKIBA, Y
KUROSU, T
IIDA, M
NAKAMURA, T
机构
[1] Department of Electronics, School of Engineering, Tokai University, Hiratsuka, Kanagawa, 259-12
关键词
D O I
10.1016/0038-1101(91)90079-E
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A diamond p-n junction diode has been fabricated by the chemical vapour deposition technique. Diphosphorus pentaoxide and boron trioxide were used for the doping sources for the n- and p-type layers, respectively. The diode shows distinct rectification characteristics at 300 K room temperature. This diode shows rectification even at 370 K and this result implies the possible use of diamond as a semiconductor in high temperature conditions.
引用
收藏
页码:139 / 141
页数:3
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