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THE MECHANISM OF ORIENTATION IN SI GRAPHOEPITAXY BY LASER OR STRIP HEATER RECRYSTALLIZATION

被引：29
作者：
SMITH, HI
VONTHOMPSON, C
GEIS, MW
LEMONS, RA
BOSCH, MA
机构：
[1] BELL TEL LABS INC,HOLMDEL,NJ 07733
[2] MIT,LINCOLN LAB,LEXINGTON,MA 02173
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 10期
关键词：
D O I：
10.1149/1.2119520
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2050 / 2053
页数：4
相关论文
共 20 条
  • [1] AN ETCH PIT TECHNIQUE FOR ANALYZING CRYSTALLOGRAPHIC ORIENTATION IN SI FILMS
    BEZJIAN, KA
    SMITH, HI
    CARTER, JM
    GEIS, MW
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (08) : 1848 - 1850
  • [2] BIEGELSEN DK, 1982, ELECTROCHEMICAL SOC, V82, P229
  • [3] LASER-INDUCED MELT DYNAMICS OF SI AND SILICA
    BOSCH, MA
    LEMONS, RA
    [J]. PHYSICAL REVIEW LETTERS, 1981, 47 (16) : 1151 - 1155
  • [4] FLANDERS DC, 1978, THESIS MIT
  • [5] SOLIDIFICATION-FRONT MODULATION TO ENTRAIN SUBBOUNDARIES IN ZONE-MELTING RECRYSTALLIZATION OF SI ON SIO2
    GEIS, MW
    SMITH, HI
    SILVERSMITH, DJ
    MOUNTAIN, RW
    THOMPSON, CV
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (05) : 1178 - 1183
  • [6] CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
    GEIS, MW
    FLANDERS, DC
    SMITH, HI
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (01) : 71 - 74
  • [7] SILICON GRAPHOEPITAXY USING A STRIP-HEATER OVEN
    GEIS, MW
    ANTONIADIS, DA
    SILVERSMITH, DJ
    MOUNTAIN, RW
    SMITH, HI
    [J]. APPLIED PHYSICS LETTERS, 1980, 37 (05) : 454 - 456
  • [8] ZONE-MELTING RECRYSTALLIZATION OF ENCAPSULATED SILICON FILMS ON SIO2 - MORPHOLOGY AND CRYSTALLOGRAPHY
    GEIS, MW
    SMITH, HI
    TSAUR, BY
    FAN, JCC
    MABY, EW
    ANTONIADIS, DA
    [J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 158 - 160
  • [9] GRAPHO-EPITAXY OF SILICON ON FUSED-SILICA USING SURFACE MICROPATTERNS AND LASER CRYSTALLIZATION
    GEIS, MW
    FLANDERS, DC
    SMITH, HI
    ANTONIADIS, DA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1640 - 1643
  • [10] ZONE-MELTING RECRYSTALLIZATION OF SI FILMS WITH A MOVEABLE-STRIP-HEATER OVEN
    GEIS, MW
    SMITH, HI
    TSAUR, BY
    FAN, JCC
    SILVERSMITH, DJ
    MOUNTAIN, RW
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (12) : 2812 - 2818
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