TITANIUM NITRIDE AS A DIFFUSION BARRIER BETWEEN NICKEL SILICIDE AND ALUMINUM

被引：16

作者：

FINETTI, M ^{[1
]}

SUNI, I ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1984年 / 13卷 / 02期

关键词：

D O I：

10.1007/BF02656683

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：327 / 340

页数：14

相关论文

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