ALUMINUM CONTACT TO NICKEL SILICIDE USING A THIN TUNGSTEN BARRIER

被引：14

作者：

BARTUR, M

NICOLET, MA

机构：

来源：

THIN SOLID FILMS | 1982年 / 91卷 / 02期

关键词：

D O I：

10.1016/0040-6090(82)90422-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：89 / 98

页数：10

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