ANOMALOUS SURFACE TRANSFORMATIONS IN CRYSTALLINE SILICON INDUCED BY SUBPICOSECOND LASER-PULSES

被引：10

作者：

KANEMITSU, Y

ISHIDA, Y

NAKADA, I

KURODA, H

机构：

[1] Univ of Tokyo, Tokyo, Jpn, Univ of Tokyo, Tokyo, Jpn

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 03期

关键词：

D O I：

10.1063/1.96797

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：209 / 211

页数：3

共 17 条

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[2] VARIOUS PHASE-TRANSITIONS AND CHANGES IN SURFACE-MORPHOLOGY OF CRYSTALLINE SILICON INDUCED BY 4-260-PS PULSES OF 1-MU-M RADIATION [J].

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[3] TEMPORALLY RESOLVED IMAGING OF SILICON SURFACES MELTED WITH INTENSE PICOSECOND 1-MU-M LASER-PULSES [J].

BOYD, IW ;

MOSS, SC ;

BOGGESS, TF ;

SMIRL, AL .

APPLIED PHYSICS LETTERS, 1985, 46 (04) :366-368

[4] ENERGY-TRANSFER DURING SILICON IRRADIATION BY FEMTOSECOND LASER-PULSE [J].

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PHYSICAL REVIEW LETTERS, 1984, 52 (22) :1998-2001

[5] GENERATION OF BROADLY TUNABLE SUBPICOSECOND LIGHT-PULSES FROM A SYNCHRONOUSLY AND PASSIVELY MODE-LOCKED CW DYE-LASER [J].

ISHIDA, Y ;

YAJIMA, T ;

NAGANUMA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (12) :L717-L720

[6] FORMATION OF PERIODIC RIPPLE STRUCTURES IN PICOSECOND PULSED LASER ANNEALING OF ION-IMPLANTED SILICON [J].

KANEMITSU, Y ;

KURODA, H ;

SHIONOYA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (08) :1060-1064

[7] PICOSECOND LASER-INDUCED ANOMALOUS CRYSTALLIZATION IN AMORPHOUS-SILICON [J].

KANEMITSU, Y ;

NAKADA, I ;

KURODA, H .

APPLIED PHYSICS LETTERS, 1985, 47 (09) :939-941

[8] TEMPORAL CHANGES IN REFLECTIVITY OF CRYSTALLINE SILICON IN PICOSECOND LASER-INDUCED MELTING [J].

KANEMITSU, Y ;

KURODA, H ;

SHIONOYA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (07) :940-940

[9] PICOSECOND DYNAMICS OF PULSED LASER ANNEALING OF ION-IMPLANTED SILICON [J].

KANEMITSU, Y ;

KURODA, H ;

SHIONOYA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (05) :618-621

[10]

KANEMITSU Y, 1984, JPN J APPL PHYS 1, V23, P612, DOI 10.1143/JJAP.23.612

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