STUDY OF THE INTERACTION OF PLASMAS WITH III-V SEMICONDUCTOR SURFACES, APPLICATION TO PASSIVATION

被引：9

作者：

FRIEDEL, P

GOURRIER, S

THEETEN, JB

ARNOULT, D

TAILLEPIED, M

ERMAN, M

机构：

来源：

SURFACE SCIENCE | 1986年 / 168卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(86)90894-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：635 / 644

页数：10

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