ABRUPT TRANSITIONS IN COMPOSITION AND DOPING PROFILE IN GAAS-GA1-XALXAS HETEROSTRUCTURES BY ATMOSPHERIC-PRESSURE MOVPE

被引:6
作者
MALUENDA, J
FRIJLINK, PM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.582552
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:334 / 337
页数:4
相关论文
共 7 条
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