PLASMA-ASSISTED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ZNSE FILMS

被引：11

作者：

MINO, N

KOBAYASHI, M

KONAGAI, M

TAKAHASHI, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.336362

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2216 / 2221

页数：6

共 22 条

[1]

BOUMAN J, 1951, SELECTED TOPICS XRAY, P59

[2] TIME RESOLVED SPECTROSCOPY OF ZNS=MN BY DYE-LASER TECHNIQUE [J].

BUSSE, W ;

GUMLICH, HE ;

MEISSNER, B ;

THEIS, D .

JOURNAL OF LUMINESCENCE, 1976, 12 (01) :693-700

[3] HYDROGEN PLASMA-ETCHING OF GAAS OXIDE [J].

CHANG, RPH ;

DARACK, S .

APPLIED PHYSICS LETTERS, 1981, 38 (11) :898-900

[4] HYDROGEN PLASMA-ETCHING OF SEMICONDUCTORS AND THEIR OXIDES [J].

CHANG, RPH ;

CHANG, CC ;

DARACK, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01) :45-50

[5] THE GROWTH BY MOCVD USING NEW GROUP-VI SOURCES AND ASSESSMENT BY HRTEM AND CL OF ZN-BASED II-VI SINGLE-CRYSTAL LAYERS [J].

COCKAYNE, B ;

WRIGHT, PJ ;

SKOLNICK, MS ;

PITT, AD ;

WILLIAMS, JO ;

NG, TL .

JOURNAL OF CRYSTAL GROWTH, 1985, 72 (1-2) :17-22

[6] REACTOR PRESSURE-DEPENDENCE OF PROPERTIES OF UNDOPED ZNSE GROWN BY LOW-PRESSURE OMVPE [J].

FUJITA, S ;

YODO, T ;

MATSUDA, Y ;

SASAKI, A .

JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) :169-172

[7] LATTICE-MISMATCH EFFECTS ON PROPERTIES IN ZNSE LAYER GROWN ON GAAS SUBSTRATE BY LOW-PRESSURE OMVPE [J].

FUJITA, S ;

YODO, T ;

SASAKI, A .

JOURNAL OF CRYSTAL GROWTH, 1985, 72 (1-2) :27-30

[8] WIDE-RANGE CONTROL OF CRYSTALLITE SIZE AND ITS ORIENTATION IN GLOW-DISCHARGE DEPOSITED MU-C-SI-H [J].

MATSUDA, A ;

KUMAGAI, K ;

TANAKA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (01) :L34-L36

[9] LOW THRESHOLD VOLTAGE ZNSE-MN THIN-FILM ELECTROLUMINESCENT CELLS PREPARED BY MOLECULAR-BEAM DEPOSITION [J].

MISHIMA, T ;

TAKAHASHI, K .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2153-2155

[10] COHERENT GROWTH OF ZNSE ON GAAS BY MOCVD [J].

MITSUHASHI, H ;

MITSUISHI, I ;

MIZUTA, M ;

KUKIMOTO, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (08) :L578-L580

← 1 2 3 →