PLASMA-ASSISTED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ZNSE FILMS

被引：11

作者：

MINO, N

KOBAYASHI, M

KONAGAI, M

TAKAHASHI, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.336362

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2216 / 2221

页数：6

共 22 条

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