ELECTRICAL-PROPERTIES AND ELECTRON-SPIN-RESONANCE OF UNDOPED MICROCRYSTALLINE SI WITH A PREFERENTIAL ORIENTATION

被引:10
作者
HASEGAWA, S
KISHI, K
KURATA, Y
机构
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1985年 / 52卷 / 02期
关键词
D O I
10.1080/01418638508244282
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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页码:199 / 209
页数:11
相关论文
共 21 条
[1]  
DAVIS EA, 1973, AMORPHOUS SEMICONDUC, P450
[2]   HYDROGEN CONTENT OF A-GE-H AND A-SI-H AS DETERMINED BY IR SPECTROSCOPY, GAS EVOLUTION AND NUCLEAR-REACTION TECHNIQUES [J].
FANG, CJ ;
GRUNTZ, KJ ;
LEY, L ;
CARDONA, M ;
DEMOND, FJ ;
MULLER, G ;
KALBITZER, S .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :255-260
[3]   TEMPERATURE-DEPENDENT FORMATION OF MICROCRYSTAL AND AMORPHOUS-SILICON BY VACUUM EVAPORATION [J].
FANG, PH ;
BAI, PG ;
KINNIER, JH ;
HUAN, Z ;
SCHUBERT, CC .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :819-821
[4]   LOW-TEMPERATURE CRYSTALLIZATION OF DOPED A-SI-H ALLOYS [J].
HAMASAKI, T ;
KURATA, H ;
HIROSE, M ;
OSAKA, Y .
APPLIED PHYSICS LETTERS, 1980, 37 (12) :1084-1086
[5]   ELECTRON-SPIN-RESONANCE IN DOPED CVD AMORPHOUS-SILICON FILMS [J].
HASEGAWA, S ;
KASAJIMA, T ;
SHIMIZU, T .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (01) :149-156
[6]   ELECTRON-SPIN-RESONANCE AND ELECTRICAL-PROPERTIES OF P-DOPED MICROCRYSTALLINE SI [J].
HASEGAWA, S ;
NARIKAWA, S ;
KURATA, Y .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1983, 48 (05) :431-447
[7]  
HASEGAWA S, 1982, J APPL PHYS, V53, P5022, DOI 10.1063/1.331378
[8]   DEPENDENCES OF ELECTRON-SPIN-RESONANCE AND ELECTRICAL-PROPERTIES ON P DOPING RATIO FOR MICROCRYSTALLINE SI [J].
HASEGAWA, S ;
NARIKAWA, S ;
KURATA, Y .
PHYSICA B & C, 1983, 117 (MAR) :914-916
[9]   DOPING AND ANNEALING EFFECTS ON ESR IN CHEMICALLY VAPOR-DEPOSITED AMORPHOUS SILICON [J].
HASEGAWA, S ;
KASAJIMA, T ;
SHIMIZU, T .
SOLID STATE COMMUNICATIONS, 1979, 29 (01) :13-16
[10]   HYDROGENATED CRYSTALLINE SILICON FABRICATED AT LOW-SUBSTRATE TEMPERATURES BY REACTIVE SPUTTERING IN HE-H2 ATMOSPHERE [J].
IMURA, T ;
MOGI, K ;
HIRAKI, A ;
NAKASHIMA, S ;
MITSUISHI, A .
SOLID STATE COMMUNICATIONS, 1981, 40 (02) :161-164