CRYSTALLIZATION OF ZIRCONIA FILMS BY THERMAL ANNEALING

被引：44

作者：

RUJKORAKARN, R

SITES, JR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573849

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：568 / 571

页数：4

共 12 条

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