X-RAY PHOTOELECTRON-SPECTROSCOPY OF ION-BEAM SPUTTER DEPOSITED SIO2, TIO2, AND TA2O5

被引：49

作者：

ROSSNAGEL, SM ^{[1
]}

SITES, JR ^{[1
]}

机构：

[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572746

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：376 / 379

页数：4

共 19 条

[1] AUGER AND X-RAY PHOTOELECTRON SPECTROSCOPIC AND ELECTROCHEMICAL CHARACTERIZATION OF TITANIUM THIN-FILM ELECTRODES
ARMSTRONG, NR
QUINN, RK
[J]. SURFACE SCIENCE, 1977, 67 (02) : 451 - 468
[2] COMBINED SIMS, AES, AND XPS INVESTIGATIONS OF TANTALUM OXIDE LAYERS
BISPINCK, H
GANSCHOW, O
WIEDMANN, L
BENNINGHOVEN, A
[J]. APPLIED PHYSICS, 1979, 18 (02): : 113 - 117
[3] MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION
CUOMO, JJ
HARPER, JME
GUARNIERI, CR
YEE, DS
ATTANASIO, LJ
ANGILELLO, J
WU, CT
HAMMOND, RH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 349 - 354
[4] LOCAL ATOMIC AND ELECTRONIC-STRUCTURE OF OXIDE-GAAS AND SIO2-SI INTERFACES USING HIGH-RESOLUTION XPS
GRUNTHANER, FJ
GRUNTHANER, PJ
VASQUEZ, RP
LEWIS, BF
MASERJIAN, J
MADHUKAR, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1443 - 1453
[5] INITIAL-STAGE OF SPUTTERING IN SILICON-OXIDE
HATTORI, T
HISAJIMA, Y
SAITO, H
SUZUKI, T
DAIMON, H
MURATA, Y
TSUKADA, M
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (03) : 244 - 246
[6] NEW STUDIES OF SI-SIO2 INTERFACE USING AUGER SPUTTER PROFILING
HELMS, CR
SPICER, WE
JOHNSON, NM
[J]. SOLID STATE COMMUNICATIONS, 1978, 25 (09) : 673 - 676
[7] THIN-FILM ANNEALING BY ION-BOMBARDMENT
HIRSCH, EH
VARGA, IK
[J]. THIN SOLID FILMS, 1980, 69 (01) : 99 - 105
[8] AN XPS STUDY OF THE INFLUENCE OF ION SPUTTERING ON BONDING IN THERMALLY GROWN SILICON DIOXIDE
HOFMANN, S
THOMAS, JH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01): : 43 - 47
[9] ESCA STUDIES ON CHANGES IN SURFACE COMPOSITION UNDER ION-BOMBARDMENT
HOLM, R
STORP, S
[J]. APPLIED PHYSICS, 1977, 12 (01): : 101 - 112
[10] Kaufman H.R., 1974, ADV ELECT ELECT PHYS, V36, P265

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