SURFACE-DEFECTS IN POLISHED SILICON STUDIED BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY

被引：25

作者：

JOHANSSON, S ^{[1
]}

SCHWEITZ, JA ^{[1
]}

LAGERLOF, KPD ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV,DEPT MAT SCI & ENGN,CLEVELAND,OH 44106

来源：

关键词：

D O I：

10.1111/j.1151-2916.1989.tb09696.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1136 / 1139

页数：4

共 21 条

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