共 15 条
- [2] Chan S. S., 1985, MATER RES SOC S P, V46, P281
- [3] INFRARED SPECTROSCOPICAL AND TEM INVESTIGATIONS OF OXYGEN PRECIPITATION IN SILICON-CRYSTALS WITH MEDIUM AND HIGH OXYGEN CONCENTRATIONS [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 85 (01): : 133 - 147
- [4] Goetzberger A., 1976, Critical Reviews in Solid State Sciences, V6, P1, DOI 10.1080/10408437608243548
- [5] GOODMAN AM, 1983, RCA REV, V44, P326
- [6] HOELZLEIN K, 1984, APPL PHYS A, V34, P155
- [7] HWANG JS, UNPUB J APPL PHYS
- [8] MEASUREMENT OF INTERFACE DEFECT STATES AT OXIDIZED SILICON SURFACES BY CONSTANT-CAPACITANCE DLTS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1407 - 1411
- [9] JOHNSON NM, 1978, PHYSICS SIO2 ITS INT, P421