GROWTH AND CHARACTERIZATION OF THIN-FILMS OF Y2O3, LA2O3 AND LA2CUO4

被引:16
作者
GAO, YM [1 ]
WU, P [1 ]
DWIGHT, K [1 ]
WOLD, A [1 ]
机构
[1] BROWN UNIV,DEPT CHEM,PROVIDENCE,RI 02912
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-4596(91)90138-8
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
Films of Y2O3, La2O3, and La2CuO4 were prepared by an ultrasonic nebulization and pyrolysis method using acetylacetonates of the corresponding metals in alcohol solvents as source materials. Homogeneous, uniform films with good adherence have been obtained using this simple technique. As-deposited yttrium and lanthanum oxide films were poorly crystallized. After postannealing in oxygen at higher temperature, they crystallized into cubic and hexagonal phases, respectively. Transparent yttrium and lanthanum oxide films have high electric breakdown voltages. Single phase polycrystalline La2CuO4 thin films were obtained from a source solution with a La:Cu ratio of 2:1. © 1991.
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页码:228 / 233
页数:6
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