PHASE-TRANSFORMATIONS OF ALLOYS ON A REACTIVE SUBSTRATE - INTERACTION OF BINARY-ALLOYS OF TRANSITION AND RARE-EARTH-METALS WITH SILICON

被引：25

作者：

THOMPSON, RD

TU, KN

OTTAVIANI, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 02期

关键词：

D O I：

10.1063/1.336186

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：705 / 710

页数：6

共 19 条

[1] SILICIDES FORMATION FOR REFRACTORY-METAL ALLOYS (TA-V AND TI-V) ON SI [J].

APPELBAUM, A ;

EIZENBERG, M .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (08) :2341-2345

[2] CHEMICAL AND STRUCTURAL ASPECTS OF REACTION AT THE TI SI INTERFACE [J].

BUTZ, R ;

RUBLOFF, GW ;

TAN, TY ;

HO, PS .

PHYSICAL REVIEW B, 1984, 30 (10) :5421-5429

[3]

EIZENBERG M, 1982, PHYS STATUS SOLIDI A, V73, P483, DOI 10.1002/pssa.2210730223

[4]

ELLIOTT RP, 1965, CONSTITUTION BINAR S, P473

[5] STUDIES OF TI-W METALLIZATION SYSTEM ON SI [J].

HARRIS, JM ;

LAU, SS ;

NICOLET, MA ;

NOWICKI, RS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (01) :120-124

[6] SOLID-STATE REACTIONS IN TITANIUM THIN-FILMS ON SILICON [J].

KATO, H ;

NAKAMURA, Y .

THIN SOLID FILMS, 1976, 34 (01) :135-138

[7] SILICIDE FORMATION WITH PD-V ALLOYS AND BILAYERS [J].

MAYER, JW ;

LAU, SS ;

TU, KN .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) :5855-5859

[8] THE INTERACTION OF NI-PT ALLOY WITH SILICON [J].

NAVA, F ;

MANTOVANI, S ;

PIGNATEL, G ;

QUEIROLO, G ;

CELOTTI, G .

THIN SOLID FILMS, 1982, 89 (04) :381-385

[9] MODIFIED FORWARD IV PLOT FOR SCHOTTKY DIODES WITH HIGH SERIES RESISTANCE [J].

NORDE, H .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (07) :5052-5053

[10]

OLOWOLAFE JO, 1979, J APPL PHYS, V50, P6386

← 1 2 →