EPITAXIAL LIFT-OFF OF ZNSE BASED II-VI STRUCTURES

被引:11
作者
BRYS, C
VERMAERKE, F
DEMEESTER, P
VANDAELE, P
RAKENNUS, K
SALOKATVE, A
UUSIMAA, P
PESSA, M
BRADLEY, AL
DORAN, JP
OGORMAN, J
HEGARTY, J
机构
[1] TAMPERE UNIV TECHNOL,DEPT PHYS,SF-33101 TAMPERE,FINLAND
[2] TRINITY COLL DUBLIN,DEPT PHYS,DUBLIN 2,IRELAND
关键词
D O I
10.1063/1.113580
中图分类号
O59 [应用物理学];
学科分类号
摘要
The epitaxial lift-off technique is applied to II-VI based structures. Epilayers of 255 nm thickness containing quantum wells are lifted off their substrates and redeposited onto polyimide coated GaAs. The technique has also been applied to II-VI samples onto which dielectric films had been deposited. Photoluminescence measurements show that the material quality has not been degraded during the processing. The success of this technique with II-VI's opens up many possibilities for the integration of these materials with metals and dielectrics in vertical structure devices.© 1995 American Institute of Physics.
引用
收藏
页码:1086 / 1088
页数:3
相关论文
共 9 条
  • [1] NARROW BANDWIDTH LONG-WAVELENGTH RESONANT-CAVITY PHOTODIODES
    CORBETT, B
    CONSIDINE, L
    WALSH, S
    KELLY, WM
    [J]. ELECTRONICS LETTERS, 1993, 29 (24) : 2148 - 2149
  • [2] EPITAXIAL LIFT-OFF AND ITS APPLICATIONS
    DEMEESTER, P
    POLLENTIER, I
    DEDOBBELAERE, P
    BRYS, C
    VANDAELE, P
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (06) : 1124 - 1135
  • [3] CRITICAL THICKNESS OF COMMON-ANION-II-VI STRAINED LAYER SUPERLATTICES (SLSS)
    PARBROOK, PJ
    HENDERSON, B
    ODONNELL, KP
    WRIGHT, PJ
    COCKAYNE, B
    [J]. JOURNAL OF CRYSTAL GROWTH, 1992, 117 (1-4) : 492 - 496
  • [4] EPITAXIAL LIFT-OFF GAAS LEDS TO SI FOR FABRICATION OF OPTO-ELECTRONIC INTEGRATED-CIRCUITS
    POLLENTIER, I
    DEMEESTER, P
    ACKAERT, A
    BUYDENS, L
    VANDAELE, P
    BAETS, R
    [J]. ELECTRONICS LETTERS, 1990, 26 (03) : 193 - 194
  • [5] FABRICATION OF A GAAS-ALGAAS GRIN-SCH SQW LASER DIODE ON SILICON BY EPITAXIAL LIFT-OFF
    POLLENTIER, I
    BUYDENS, L
    VANDAELE, P
    DEMEESTER, P
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1991, 3 (02) : 115 - 117
  • [6] POLLENTIER I, 1990, ELECTRON LETT, V26, P925
  • [7] SHUMACHER H, 1989, ELECTRON LETT, V25, P1653
  • [8] Yablonovitch E., 1989, IEEE Photonics Technology Letters, V1, P41, DOI 10.1109/68.91003
  • [9] EXTREME SELECTIVITY IN THE LIFT-OFF OF EPITAXIAL GAAS FILMS
    YABLONOVITCH, E
    GMITTER, T
    HARBISON, JP
    BHAT, R
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (26) : 2222 - 2224