RAPID COMPUTER-CONTROLLED CAPACITANCE TRANSIENT CHARACTERIZATION OF DEEP-LEVEL CENTERS

被引：9

作者：

MAGUIRE, HG

MARSHALL, A

机构：

[1] Trent Polytechnic, Nottingham, Engl, Trent Polytechnic, Nottingham, Engl

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1986年 / 35卷 / 03期

关键词：

D O I：

10.1109/TIM.1986.6499216

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：313 / 317

页数：5

共 10 条

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[2]

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[4] A COMPUTER-CONTROLLED DEEP-LEVEL TRANSIENT SPECTROSCOPY SYSTEM FOR SEMICONDUCTOR PROCESS-CONTROL [J].

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[5] DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J].

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[6] CORRELATION METHOD FOR SEMICONDUCTOR TRANSIENT SIGNAL MEASUREMENTS [J].

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[7] FOURIER-TRANSFORMATION ANALYSIS OF DEEP LEVEL TRANSIENT SIGNALS IN SEMICONDUCTORS [J].

OKUYAMA, M ;

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SOLID-STATE ELECTRONICS, 1983, 26 (07) :689-694

[8] A LOW-COST MICROPROCESSOR-BASED DEEP-LEVEL TRANSIENT SPECTROSCOPY (DLTS) SYSTEM [J].

SEXTON, FW ;

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IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1981, 30 (03) :186-193

[9] FAST DIGITAL APPARATUS FOR CAPACITANCE TRANSIENT ANALYSIS [J].

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[10]

WANG CD, 1981, J APPL PHYS, V52, P526

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