RAPID ANNEALING OF TITANIUM SILICIDE USING A GRAPHITE STRIP HEATER

被引：9

作者：

JONES, RE

LI, BZ

DANESHVAR, K

DAVIS, J

机构：

[1] HEWLETT PACKARD, DEPT MAT, COLORADO SPRINGS, CO 80901 USA

[2] AUBURN UNIV, DEPT PHYS, AUBURN, AL 36849 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 12期

关键词：

D O I：

10.1063/1.333896

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3465 / 3470

页数：6

共 26 条

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