THE IMPLEMENTATION OF A REDUCED-FIELD PROFILE DESIGN FOR HIGH-PERFORMANCE BIPOLAR-TRANSISTORS

被引:16
作者
LU, PF
COMFORT, JH
TANG, DD
MEYERSON, BS
SUN, JYC
机构
[1] IBM Thomas J. Watson Research Center, Yorktown Heights
关键词
D O I
10.1109/55.57926
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes the first realization of a reduced-field design concept for advanced bipolar devices using the low-temperature epitaxial (LTE) technique to form the base layer. By inserting a lightly doped collector (LDC) spacer layer between the heavily doped base and collector regions, we have successfully demonstrated that the collector-base (CB) junction avalanche multiplication can be reduced substantially while maintaining high collector doping for current density consideration. Similar applications of the LDS technique to the emitter-base (EB) junction also result in a lower electric field, thus less EB junction reverse leakage. © 1990 IEEE
引用
收藏
页码:336 / 338
页数:3
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