FILM MODIFICATION BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION

被引：117

作者：

ROSSNAGEL, SM

CUOMO, JJ

机构：

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90040-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：143 / 156

页数：14

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