FILM MODIFICATION BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION

被引：117

作者：

ROSSNAGEL, SM

CUOMO, JJ

机构：

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90040-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：143 / 156

页数：14

共 48 条

[11] THIN-FILM ANNEALING BY ION-BOMBARDMENT [J].

HIRSCH, EH ;

VARGA, IK .

THIN SOLID FILMS, 1980, 69 (01) :99-105

[12] INTERNAL-STRESSES IN SPUTTERED CHROMIUM [J].

HOFFMAN, DW ;

THORNTON, JA .

THIN SOLID FILMS, 1977, 40 (JAN) :355-363

[13] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THE X-RAY MICROSTRUCTURE OF THIN SILVER FILMS [J].

HUANG, TC ;

LIM, G ;

PARMIGIANI, F ;

KAY, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2161-2166

[14]

HULTMANN L, 1988, THESIS LINKOPING U S, P163

[15] FOCUSED ION-BEAM DESIGNS FOR SPUTTER DEPOSITION [J].

KAUFMAN, HR ;

HARPER, JME ;

CUOMO, JJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :179-180

[16] EFFECT OF ENERGETIC NEUTRALIZED NOBLE-GAS IONS ON THE STRUCTURE OF ION-BEAM SPUTTERED THIN METAL-FILMS [J].

KAY, E ;

PARMIGIANI, F ;

PARRISH, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :44-51

[17]

KAY E, 1986, NATO ASI SER, V112

[18] NUCLEATION, GROWTH AND TRANSFORMATION OF AMORPHOUS AND CRYSTALLINE SOLIDS CONDENSING FROM THE GAS-PHASE [J].

KRIKORIAN, E ;

SNEED, RJ .

ASTROPHYSICS AND SPACE SCIENCE, 1979, 65 (01) :129-154

[19]

KRISHNASWAMY SV, IN PRESS J VAC SCI T

[20] EFFECT OF ION-BOMBARDMENT ON INITIAL-STAGES OF THIN-FILM GROWTH [J].

MARINOV, M .

THIN SOLID FILMS, 1977, 46 (03) :267-274

← 1 2 3 4 5 →