SOLID-PHASE REGROWTH OF COMPOUND SEMICONDUCTORS BY REACTION-DRIVEN DECOMPOSITION OF INTERMEDIATE PHASES

被引：93

作者：

SANDS, T ^{[1
]}

MARSHALL, ED ^{[1
]}

WANG, LC ^{[1
]}

机构：

[1] UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92093

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 05期

关键词：

D O I：

10.1557/JMR.1988.0914

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Semiconductor Materials

引用

页码：914 / 921

页数：8

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