ELECTRICAL AND PHYSICAL-PROPERTIES OF ULTRATHIN REOXIDIZED NITRIDED OXIDES PREPARED BY RAPID THERMAL-PROCESSING

被引：225

作者：

HORI, T

IWASAKI, H

TSUJI, K

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1989年 / 36卷 / 02期

关键词：

D O I：

10.1109/16.19935

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：340 / 350

页数：11

共 28 条

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[8] CHARGE-TRAPPING PROPERTIES OF ULTRATHIN NITRIDED OXIDES PREPARED BY RAPID THERMAL ANNEALING [J].

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