MULTIPHOTON IONIZATION SPECTROSCOPY MEASUREMENTS OF SILICON ATOMS DURING VAPOR-PHASE SYNTHESIS OF CERAMIC PARTICLES

被引：18

作者：

ZACHARIAH, MR

JOKLIK, RG

机构：

[1] Center for Chemical Technology, National Institute of Standards and Technology, Gaithersburg

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 68卷 / 01期

关键词：

D O I：

10.1063/1.347134

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Resonance-enhanced multiphoton ionization spectroscopy has been applied to the problem of detection of gas-phase species in a dense particle-forming flow. Relative silicon atom profiles in an atmospheric pressure flame reactor producing silica particles have been made using a 2+1 ionization scheme. The results have shown that silicon atoms are confined to a very narrow time window in the reactor (<15 ms). In addition, the nonresonant background indicated the presence of ionizable clusters and could be a valuable tool for observing the presence and location of small clusters. The effect of varying silane loading changed both the location and magnitude of the silicon concentration observed. The results suggest that chain branching chemistry is important in the production of silicon and that enhancement of pyrolytic relative to oxidative processes occurs as the silane loading is increased. Finally, the role of charged particles on electron capture was investigated. It was found that significant attenuation of the electron current can lead to highly erroneous results.

引用

页码：311 / 317

页数：7

共 29 条

[11]

HARDESTY DR, 1973, 14TH S INT COMB, P907

[12] OBSERVATION OF GAS-PHASE SI ATOMS IN THE CHEMICAL VAPOR-DEPOSITION OF SILICON FROM DICHLOROSILANE [J].

HO, P ;

BREILAND, WG .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) :5184-5186

[13]

HOMANN KH, 1989, MAR ROUND TABL DISC

[14] A NEW ELECTRONIC-SPECTRUM OF THE SIH3 RADICAL OBSERVED USING MULTIPHOTON IONIZATION SPECTROSCOPY [J].

JOHNSON, RD ;

HUDGENS, JW .

CHEMICAL PHYSICS LETTERS, 1987, 141 (03) :163-165

[15]

Li T., 1985, OPTICAL FIBER COMMUN

[16] RESONANTLY ENHANCED 2-PHOTON PHOTO-IONIZATION OF NO IN AN ATMOSPHERIC FLAME [J].

MALLARD, WG ;

MILLER, JH ;

SMYTH, KC .

JOURNAL OF CHEMICAL PHYSICS, 1982, 76 (07) :3483-3492

[17]

Pandya T. P., 1963, 9 S INT COMB, P587

[18] SPATIAL DEPENDENCE OF PARTICLE LIGHT-SCATTERING IN AN RF SILANE DISCHARGE [J].

ROTH, RM ;

SPEARS, KG ;

STEIN, GD ;

WONG, G .

APPLIED PHYSICS LETTERS, 1985, 46 (03) :253-255

[19] MULTIPHOTON-IONIZATION MASS-SPECTROMETRIC DETECTION OF GALLIUM ATOM DURING THE TRIMETHYLGALLIUM CVD REACTION [J].

SQUIRE, DW ;

DULCEY, CS ;

LIN, MC .

CHEMICAL PHYSICS LETTERS, 1986, 131 (1-2) :112-117

[20] MULTIPHOTON IONIZATION DETECTION OF CH, CARBON-ATOMS, AND O2 IN PREMIXED HYDROCARBON FLAMES [J].

TJOSSEM, PJH ;

SMYTH, KC .

CHEMICAL PHYSICS LETTERS, 1988, 144 (01) :51-57

← 1 2 3 →