RAPID THERMAL ANNEALING OF GAAS IN A GRAPHITE SUSCEPTOR - COMPARISON WITH PROXIMITY ANNEALING

被引：15

作者：

PEARTON, SJ

CARUSO, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343534

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：663 / 665

页数：3

共 19 条

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