PILL-BOX CAPLESS THERMAL-HEAT-PULSE ANNEALING OF ION-IMPLANTED GAAS

被引：16

作者：

HAYDL, WH

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1984年 / 5卷 / 03期

关键词：

D O I：

10.1109/EDL.1984.25838

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：78 / 81

页数：4

共 26 条

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[6]

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[8]

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[9]

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[10]

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