THERMAL EFFECTS IN X-RAY MASKS DURING SYNCHROTRON STORAGE RING IRRADIATION

被引：21

作者：

VLADIMIRSKY, Y

MALDONADO, J

FAIR, R

ACOSTA, R

VLADIMIRSKY, O

VISWANATHAN, R

VOELKER, H

CERRINA, F

WELLS, GM

HANSEN, M

NACHMAN, R

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

[2] UNIV WISCONSIN,CTR SYNCHROTRON RADIAT,STOUGHTON,WI 53589

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584509

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1657 / 1661

页数：5

共 15 条

[1]

DAY WA, 1985, HEAT CONDUCTION LINE, P6

[2]

GROBMAN WD, 1983, HDB SYNCHROTRON RAD, V1, P1131

[3] HEATING AND TEMPERATURE-INDUCED DISTORTIONS OF SILICON X-RAY MASKS [J].

HEINRICH, K ;

BETZ, H ;

HEUBERGER, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1352-1357

[4]

Heuberger A., 1986, Microelectronic Engineering, V5, P3, DOI 10.1016/0167-9317(86)90026-2

[5] X-RAY-LITHOGRAPHY [J].

HEUBERGER, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :107-121

[6] X-RAY MASK HEATING DURING ELECTRON-BEAM PATTERNING [J].

KARNEZOS, M ;

WEIMAR, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :278-282

[7] TUNGSTEN - AN ALTERNATIVE TO GOLD FOR X-RAY MASKS [J].

KARNEZOS, M ;

RUBY, R ;

HEFLINGER, B ;

NAKANO, H ;

JONES, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :283-287

[8]

MORI I, 1987, 1987 OS U PHOT FACT, P312

[9]

MULLER KH, 1983, P MICROCIRCUIT ENG, V83, P261

[10]

PARKUS H, 1968, THERMOELASTICITY, P24

← 1 2 →