INCORPORATION EFFECTS OF NITROGEN INTO PHOSPHORUS DOPED MICROCRYSTALLINE SI H FILMS

被引：2

作者：

HASEGAWA, S

TSUKAO, T

KURATA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1986年 / 25卷 / 02期

关键词：

D O I：

10.1143/JJAP.25.L114

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L114 / L116

页数：3

共 17 条

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[10]

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