VIBRATIONAL SPECTROSCOPY OF HYDROGENATED EVAPORATED AMORPHOUS-SILICON FILMS

被引：20

作者：

KNIFFLER, N

SCHRODER, B

GEIGER, J

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1983年 / 58卷 / 2-3期

关键词：

D O I：

10.1016/0022-3093(83)90020-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：153 / 163

页数：11

共 28 条

[1]

Bellamy L.J, 1975, INFRARED SPECTRA COM

[2]

BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[3] ANALYSIS OF EVAPORATED SILICON OXIDE FILMS BY MEANS OF (D,P) NUCLEAR REACTIONS AND INFRARED SPECTROPHOTOMETRY [J].

CACHARD, A ;

ROGER, JA ;

PIVOT, J ;

DUPUY, CHS .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 5 (03) :637-&

[4] SOME ELECTRICAL AND OPTICAL-PROPERTIES OF EVAPORATED A-SI-H DOPED WITH MOLECULAR-HYDROGEN [J].

DELLAFERA, P ;

LABUSCH, R ;

ROSCHER, HH .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 45 (06) :607-614

[5] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300

[6] OBSERVATION OF GRAIN-BOUNDARY HYDROGEN IN POLYCRYSTALLINE SILICON WITH FOURIER-TRANSFORM INFRARED-SPECTROSCOPY [J].

GINLEY, DS ;

HAALAND, DM .

APPLIED PHYSICS LETTERS, 1981, 39 (03) :271-273

[7] STUDIES OF THE MECHANISM OF THE DECOMPOSITION OF HYDROGENATED A-SI FILMS [J].

JOHN, P ;

ODEH, IM ;

THOMAS, MJK ;

TRICKER, MJ ;

RIDDOCH, F ;

WILSON, JIB .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1980, 42 (05) :671-681

[8] CRYSTAL STRUCTURE OF SILANOLS AND THEIR INFRARED SPECTRA [J].

KAKUDO, M ;

KASAI, PN ;

WATASE, T .

JOURNAL OF CHEMICAL PHYSICS, 1953, 21 (10) :1894-1895

[9] ANNEALING AND HYDROGENATION BEHAVIOR OF EVAPORATED AND SPUTTERED HIGH-PURITY AMORPHOUS-SILICON FILMS [J].

KNIFFLER, N ;

MULLER, WW ;

PIRRUNG, JM ;

HANISCH, N ;

SCHRODER, B ;

GEIGER, J .

JOURNAL DE PHYSIQUE, 1981, 42 (NC4) :811-814

[10] ELECTRONIC AND STRUCTURAL-PROPERTIES OF PLASMA-DEPOSITED A-SI-O-H - STORY OF O2 [J].

KNIGHTS, JC ;

STREET, RA ;

LUCOVSKY, G .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :279-284

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