DEGRADATION OF PLANAR JUNCTIONS DURING REOXIDATION

被引：9

作者：

BARSON, F

ARMSTRONG, WJ

MUTTER, WE

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1964年 / 111卷 / 11期

关键词：

D O I：

10.1149/1.2425974

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1263 / 1266

页数：4

共 13 条

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[7] GETTERING OF METALLIC IMPURITIES FROM PLANAR SILICON DIODES [J].

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[8]

JAMES BD, 1960, MAY CHIC M EL SOC

[9] THE DIFFUSION OF PHOSPHORUS IN SILICON [J].

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[10]

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