CURRENT CROWDING AND MISALIGNMENT EFFECTS AS SOURCES OF ERROR IN CONTACT RESISTIVITY MEASUREMENTS .2. EXPERIMENTAL RESULTS AND COMPUTER-SIMULATION OF SELF-ALIGNED TEST STRUCTURES

被引：10

作者：

CAPPELLETTI, P

FINETTI, M

SCORZONI, A

SUNI, I

CIRCELLI, N

DALLALIBERA, G

机构：

[1] CNR, LAMEL INST, I-40126 BOLOGNA, ITALY

[2] TECH RES CTR FINLAND, SEMICOND LAB, SF-02150 ESPOO, FINLAND

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 03期

关键词：

D O I：

10.1109/T-ED.1987.22959

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：532 / 536

页数：5

共 11 条

[1] MODELS FOR CONTACTS TO PLANAR DEVICES [J].

BERGER, HH .

SOLID-STATE ELECTRONICS, 1972, 15 (02) :145-&

[2]

CAPPELLETTI P, IN PRESS SELF ALIGNE

[3] CONTACT RESISTIVITY OF SILICON SILICIDE STRUCTURES FORMED BY THIN-FILM REACTIONS [J].

FINETTI, M ;

GUERRI, S ;

NEGRINI, P ;

SCORZONI, A ;

SUNI, I .

THIN SOLID FILMS, 1985, 130 (1-2) :37-45

[4] LATERAL CURRENT CROWDING EFFECTS ON CONTACT RESISTANCE MEASUREMENTS IN 4 TERMINAL RESISTOR TEST PATTERNS [J].

FINETTI, M ;

SCORZONI, A ;

SONCINI, G .

IEEE ELECTRON DEVICE LETTERS, 1984, 5 (12) :524-526

[5]

Loh W. M., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P586

[6] A DIRECT MEASUREMENT OF INTERFACIAL CONTACT RESISTANCE [J].

PROCTOR, SJ ;

LINHOLM, LW .

ELECTRON DEVICE LETTERS, 1982, 3 (10) :294-296

[7] CURRENT CROWDING AND MISALIGNMENT EFFECTS AS SOURCES OF ERROR IN CONTACT RESISTIVITY MEASUREMENTS .1. COMPUTER-SIMULATION OF CONVENTIONAL CER AND CKR STRUCTURES [J].

SCORZONI, A ;

FINETTI, M ;

GRAHN, K ;

SUNI, I ;

CAPPELLETTI, P .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) :525-531

[8]

SUNI I, 1986, APR MRS SPRING M PAL

[9]

SUNI I, IN PRESS

[10] CURRENT CROWDING EFFECTS AND DETERMINATION OF SPECIFIC CONTACT RESISTIVITY FROM CONTACT END RESISTANCE (CER) MEASUREMENTS [J].

SWIRHUN, SE ;

LOH, WM ;

SWANSON, RM ;

SARASWAT, KC .

IEEE ELECTRON DEVICE LETTERS, 1985, 6 (12) :639-641

← 1 2 →