CURRENT CROWDING AND MISALIGNMENT EFFECTS AS SOURCES OF ERROR IN CONTACT RESISTIVITY MEASUREMENTS .1. COMPUTER-SIMULATION OF CONVENTIONAL CER AND CKR STRUCTURES

被引：18

作者：

SCORZONI, A

FINETTI, M

GRAHN, K

SUNI, I

CAPPELLETTI, P

机构：

[1] TECH RES CTR FINLAND, SEMICOND LAB, SF-02150 ESPOO, FINLAND

[2] SGS MICROELETTRON, DEPT CENT RES & DEV, AGRATE BRIANZA, ITALY

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 03期

关键词：

D O I：

10.1109/T-ED.1987.22958

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：525 / 531

页数：7

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