AL-0.9-PERCENT SI SI OHMIC CONTACTS TO SHALLOW JUNCTIONS

[1] NATURE OF BARRIER HEIGHT VARIATIONS IN ALLOYED AL-SI SCHOTTKY-BARRIER DIODES [J]. SOLID-STATE ELECTRONICS, 1975, 18 (03) : 290 - &

[2] CONTACT RESISTANCE AND CONTACT RESISTIVITY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (04) : 507 - &

[3] THERMALLY-INDUCED CHANGES IN BARRIER HEIGHTS OF ALUMINUM CONTACTS TO PARA-TYPE AND NORMAL-TYPE SILICON [J]. SOLID STATE COMMUNICATIONS, 1975, 16 (01) : 87 - 89

[4] ALUMINUM-SILICON SCHOTTKY BARRIERS AND OHMIC CONTACTS IN INTEGRATED-CIRCUITS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (06) : 538 - 544

[5] BEHAVIOR OF AL-SI SCHOTTKY-BARRIER DIODES UNDER HEAT-TREATMENT [J]. SOLID-STATE ELECTRONICS, 1973, 16 (01) : 119 - &

[6] EFFECT OF SI DISSOLUTION AND RECRYSTALLIZATION UPON OHMIC AL-P-SI CONTACTS [J]. APPLIED PHYSICS LETTERS, 1980, 37 (02) : 215 - 217

[7] ALUMINUM-SILICON OHMIC CONTACT ON SHALLOW N+-P JUNCTIONS [J]. SOLID-STATE ELECTRONICS, 1980, 23 (03) : 255 - &

[8] METALLIZATION IN MICROELECTRONICS [J]. THIN SOLID FILMS, 1977, 45 (01) : 69 - 84

[9] CONTACT RESISTANCE RESPONSE SURFACE OF SINTERED AL FILMS ON (100) SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 328 - 330

[10] Lepselter M. P., 1969, Ohmic contacts to semiconductors, P159

[1] NATURE OF BARRIER HEIGHT VARIATIONS IN ALLOYED AL-SI SCHOTTKY-BARRIER DIODES [J]. SOLID-STATE ELECTRONICS, 1975, 18 (03) : 290 - &

[2] CONTACT RESISTANCE AND CONTACT RESISTIVITY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (04) : 507 - &

[3] THERMALLY-INDUCED CHANGES IN BARRIER HEIGHTS OF ALUMINUM CONTACTS TO PARA-TYPE AND NORMAL-TYPE SILICON [J]. SOLID STATE COMMUNICATIONS, 1975, 16 (01) : 87 - 89

[4] ALUMINUM-SILICON SCHOTTKY BARRIERS AND OHMIC CONTACTS IN INTEGRATED-CIRCUITS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (06) : 538 - 544

[5] BEHAVIOR OF AL-SI SCHOTTKY-BARRIER DIODES UNDER HEAT-TREATMENT [J]. SOLID-STATE ELECTRONICS, 1973, 16 (01) : 119 - &

[6] EFFECT OF SI DISSOLUTION AND RECRYSTALLIZATION UPON OHMIC AL-P-SI CONTACTS [J]. APPLIED PHYSICS LETTERS, 1980, 37 (02) : 215 - 217

[7] ALUMINUM-SILICON OHMIC CONTACT ON SHALLOW N+-P JUNCTIONS [J]. SOLID-STATE ELECTRONICS, 1980, 23 (03) : 255 - &

[8] METALLIZATION IN MICROELECTRONICS [J]. THIN SOLID FILMS, 1977, 45 (01) : 69 - 84

[9] CONTACT RESISTANCE RESPONSE SURFACE OF SINTERED AL FILMS ON (100) SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 328 - 330

[10] Lepselter M. P., 1969, Ohmic contacts to semiconductors, P159