STUDIES OF AU OHMIC CONTACTS TO P-TYPE HG1-XCDXTE

被引:13
作者
KRISHNAMURTHY, V [1 ]
SIMMONS, A [1 ]
HELMS, CR [1 ]
机构
[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 02期
关键词
D O I
10.1116/1.576977
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Electroless Au contacts to p-type Hg1-xCdxTe in many cases exhibit ohmic behavior. Our investigation of the interfacial chemistry of such contacts suggest that this ohmic behavior is due to the presence of a Te, O, and Cl layer. To test this hypothesis, thin plasma oxide layers were then used in evaporated Au contacts. Ohmic behavior was also observed for the annealed plasma oxidized contacts. We believe this ohmic behavior is primarily a result of the low interface state density at the interfacial layer/Hg1 xCdxTe interface and in addition, a 100 °C anneal promoted a further reduction in the interface state density and thus lowered the contact resistance. In comparison, as-deposited and annealed Au contacts without a thin interfacial layer were rectifying with a large barrier height. © 1990, American Vacuum Society. All rights reserved.
引用
收藏
页码:1147 / 1151
页数:5
相关论文
共 19 条
[1]  
ANDRIEVS.AI, 1974, SOV PHYS SEMICOND+, V7, P1112
[2]   A UNIVERSAL TREND IN THE BINDING-ENERGIES OF DEEP IMPURITIES IN SEMICONDUCTORS [J].
CALDAS, MJ ;
FAZZIO, A ;
ZUNGER, A .
APPLIED PHYSICS LETTERS, 1984, 45 (06) :671-673
[3]   ALUMINUM-SILICON SCHOTTKY BARRIERS AND OHMIC CONTACTS IN INTEGRATED-CIRCUITS [J].
CARD, HC .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (06) :538-544
[4]   DEPOSITION OF THE UNREACTIVE METAL AU ONTO SPUTTERED AND CLEAVED HG1-XCDXTE SURFACES [J].
DAVIS, GD ;
BECK, WA ;
KELLY, MK ;
TACHE, N ;
MARGARITONDO, G .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (09) :3157-3161
[5]   DEPOSITION OF AU OVERLAYERS ONTO CLEAVED (HG,CD)TE SURFACES [J].
DAVIS, GD ;
BECK, WA ;
BYER, NE ;
DANIELS, RR ;
MARGARITONDO, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :546-550
[6]   INTERFACE CHEMISTRY OF TERNARY SEMICONDUCTORS - LOCAL MORPHOLOGY OF THE HG1-XCDXTE(110)-CR INTERFACE [J].
FRANCIOSI, A ;
PHILIP, P ;
PETERMAN, DJ .
PHYSICAL REVIEW B, 1985, 32 (12) :8100-8107
[7]   OVERLAYER-CATION REACTION AT THE PT/HG1-XCDXTE INTERFACE [J].
FRIEDMAN, DJ ;
CAREY, GP ;
LINDAU, I ;
SPICER, WE .
PHYSICAL REVIEW B, 1987, 35 (03) :1188-1195
[8]   THE AG/(HG,CD)TE AND AL/(HG,CD)TE INTERFACES [J].
FRIEDMAN, DJ ;
CAREY, GP ;
SHIH, CK ;
LINDAU, I ;
SPICER, WE ;
WILSON, JA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (04) :1977-1982
[9]   THE PROPERTIES OF GOLD IN BRIDGMAN GROWN CDXHG1-XTE [J].
JONES, CL ;
CAPPER, P ;
QUELCH, MJT ;
BROWN, M .
JOURNAL OF CRYSTAL GROWTH, 1983, 64 (03) :417-432
[10]   HGCDTE CHARGE-COUPLED DEVICE TECHNOLOGY [J].
KINCH, MA ;
CHAPMAN, RA ;
SIMMONS, A ;
BUSS, DD ;
BORRELLO, SR .
INFRARED PHYSICS, 1980, 20 (01) :1-20