NEW OXIDE-GROWTH LAW AND THE THERMAL-OXIDATION OF SILICON

[11] THERMAL-OXIDATION OF SILICON IN VARIOUS OXYGEN PARTIAL PRESSURES DILUTED BY NITROGEN [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) : 2891 - 2896

[12] HIGH-PRESSURE OXIDATION OF SILICON IN DRY OXYGEN [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (12) : 2828 - 2834

[13] MASSOUD HZ, 1982, TR DXG50182 STANF U

[14] ON RATES OF OXIDATION OF SILICON + OF SILICON CARBIDE IN OXYGEN + CORRELATION WITH PERMEABILITY OF SILICA GLASS [J]. ACTA CHEMICA SCANDINAVICA, 1964, 18 (07): : 1596 - +

[15] SEPARATION OF LINEAR AND PARABOLIC TERMS IN STEAM OXIDATION OF SILICON [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1966, 10 (03) : 198 - &

[16] REVESZ AG, 1968, RCA REV, V29, P1

[17] STULL DR, 1971, JANAF THERMOCHEMICAL, P37

[18] VANDERME.YJ, 1972, J ELECTROCHEM SOC, V119, P530

[11] THERMAL-OXIDATION OF SILICON IN VARIOUS OXYGEN PARTIAL PRESSURES DILUTED BY NITROGEN [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) : 2891 - 2896

[12] HIGH-PRESSURE OXIDATION OF SILICON IN DRY OXYGEN [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (12) : 2828 - 2834

[13] MASSOUD HZ, 1982, TR DXG50182 STANF U

[14] ON RATES OF OXIDATION OF SILICON + OF SILICON CARBIDE IN OXYGEN + CORRELATION WITH PERMEABILITY OF SILICA GLASS [J]. ACTA CHEMICA SCANDINAVICA, 1964, 18 (07): : 1596 - +

[15] SEPARATION OF LINEAR AND PARABOLIC TERMS IN STEAM OXIDATION OF SILICON [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1966, 10 (03) : 198 - &

[16] REVESZ AG, 1968, RCA REV, V29, P1

[17] STULL DR, 1971, JANAF THERMOCHEMICAL, P37

[18] VANDERME.YJ, 1972, J ELECTROCHEM SOC, V119, P530