COMPARISON OF SI(100) AND SI(111) SURFACES AFTER MODERATE TO HIGH EXPOSURES OF XEF2

被引:28
作者
ROOP, B [1 ]
JOYCE, S [1 ]
SCHULTZ, JC [1 ]
STEINFELD, JI [1 ]
机构
[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139
关键词
D O I
10.1016/0039-6028(86)90202-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:455 / 464
页数:10
相关论文
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