INTERFACE PROPERTIES OF AL-SIO2-IN0.53GA0.47AS MIS DEVICES

被引：5

作者：

SHEN, CC ^{[1
]}

PANDE, KP ^{[1
]}

机构：

[1] BENDIX ADV TECHNOL CTR, COLUMBIA, MD 21045 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1984年 / 2卷 / 03期

关键词：

D O I：

10.1116/1.582815

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：314 / 315

页数：2

共 16 条

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