SILICON OXYGEN COMPLEXES CONTAINING 3 OXYGEN-ATOMS AS THE DOMINANT THERMAL DONOR SPECIES IN HEAT-TREATED OXYGEN-CONTAINING SILICON

被引：24

作者：

OEHRLEIN, GS

机构：

来源：

关键词：

D O I：

10.1063/1.332728

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5453 / 5455

页数：3

共 7 条

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