INFLUENCE OF THE SUBSTRATE ORIENTATION ON SI INCORPORATION IN MOLECULAR-BEAM EPITAXIAL GAAS

被引:37
作者
BOSE, SS
LEE, B
KIM, MH
STILLMAN, GE
WANG, WI
机构
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.340066
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:743 / 748
页数:6
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共 24 条
  • [1] INCORPORATION AND CHARACTERIZATION OF ACCEPTORS IN EPITAXIAL GAAS
    ASHEN, DJ
    DEAN, PJ
    HURLE, DTJ
    MULLIN, JB
    WHITE, AM
    [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1975, 36 (10) : 1041 - 1053
  • [2] SHALLOW ACCEPTOR LUMINESCENCE IN GAAS GROWN BY LIQUID-PHASE EPITAXY
    BRANTLEY, WA
    QUEISSER, HJ
    HWANG, CJ
    DAWSON, LR
    [J]. SOLID STATE COMMUNICATIONS, 1972, 10 (12) : 1141 - &
  • [3] Cho A.Y., 1970, I PHYS C SER, V9, P18
  • [4] LOW COMPENSATION VAPOR-PHASE EPITAXIAL GALLIUM-ARSENIDE
    COLTER, PC
    LOOK, DC
    REYNOLDS, DC
    [J]. APPLIED PHYSICS LETTERS, 1983, 43 (03) : 282 - 284
  • [5] AN ANALYTICAL EVALUATION OF GAAS GROWN WITH COMMERCIAL AND REPURIFIED TRIMETHYLGALLIUM
    HESS, KL
    DAPKUS, PD
    MANASEVIT, HM
    LOW, TS
    SKROMME, BJ
    STILLMAN, GE
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (06) : 1115 - 1137
  • [6] HICKS HGB, 1970, I C SER, V9, P92
  • [7] ILEGEMS M, 1975, I PHYS C SER, V24, P1
  • [8] Kim M.J., UNPUB
  • [9] LOW TS, 1983, I PHYS C SER, V65, P515
  • [10] PHOTO-LUMINESCENCE STUDY OF THE INCORPORATION OF SILICON IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY
    MENDEZ, EE
    HEIBLUM, M
    FISHER, R
    KLEM, J
    THORNE, RE
    MORKOC, H
    [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (07) : 4202 - 4204