STRUCTURE OF THE INP/SIO2 INTERFACE

被引：8

作者：

LILIENTAL, Z

KRIVANEK, OL

WAGER, JF

GOODNICK, SM

机构：

[1] ARIZONA STATE UNIV,CTR SOLID STATE SCI,TEMPE,AZ 85287

[2] ARIZONA STATE UNIV,DEPT PHYS,TEMPE,AZ 85287

[3] OREGON STATE UNIV,DEPT ELECT & COMP ENGN,CORVALLIS,OR 97331

[4] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 09期

关键词：

D O I：

10.1063/1.95877

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：889 / 891

页数：3

共 11 条

[1] INFLUENCE OF INTERFACIAL STRUCTURE ON THE ELECTRONIC-PROPERTIES OF SIO2/INP MISFETS [J].

GEIB, KM ;

GOODNICK, SM ;

LIN, DY ;

GANN, RG ;

WILMSEN, CW ;

WAGER, JF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (03) :516-521

[2] NEW MODEL FOR SLOW CURRENT DRIFT IN INP METAL-INSULATOR-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS [J].

GOODNICK, SM ;

HWANG, T ;

WILMSEN, CW .

APPLIED PHYSICS LETTERS, 1984, 44 (04) :453-455

[3] HIGH-RESOLUTION IMAGING OF THE INTERFACIAL REGION IN METAL-INSULATOR-SEMICONDUCTOR AND SCHOTTKY DIODES [J].

GREEN, MA ;

BLAKERS, AW ;

KRIVANEK, OL .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2885-2887

[4] ION-BEAM MILLING OF INP WITH AN AR/O2-GAS MIXTURE [J].

KATZSCHNER, W ;

STECKENBORN, A ;

LOFFLER, R ;

GROTE, N .

APPLIED PHYSICS LETTERS, 1984, 44 (03) :352-354

[5] HREM IMAGING AND MICROANALYSIS OF A III-V SEMICONDUCTOR OXIDE INTERFACE [J].

KRIVANEK, OL ;

FORTNER, SL .

ULTRAMICROSCOPY, 1984, 14 (1-2) :121-126

[6]

LILIENTAL Z, 1984, MATERIALS RES SOC M

[7] PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITED SIO2/INP INTERFACE [J].

WAGER, JF ;

WILMSEN, CW .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) :5789-5797

[8] ESTIMATION OF THE BAND-GAP OF INPO4 [J].

WAGER, JF ;

WILMSEN, CW ;

KAZMERSKI, LL .

APPLIED PHYSICS LETTERS, 1983, 42 (07) :589-591

[9] INTERFACE FORMATION OF DEPOSITED INSULATOR LAYERS ON GAAS AND INP [J].

WILMSEN, CW ;

KEE, RW ;

WAGER, JF ;

STANNARD, J ;

MESSICK, L .

THIN SOLID FILMS, 1979, 64 (01) :49-55

[10] TRAPS AT THE DEPOSITED INSULATOR INP INTERFACE - A DISCUSSION OF A POSSIBLE CAUSE [J].

WILMSEN, CW ;

WAGER, JF ;

GEIB, KM ;

HWANG, T ;

FATHIPOUR, M .

THIN SOLID FILMS, 1983, 103 (1-2) :47-52

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