MATERIAL EFFECTS ON THE CRACKING EFFICIENCY OF MOLECULAR-BEAM EPITAXY ARSENIC CRACKING FURNACES

被引：9

作者：

LEE, RL

SCHAFFER, WJ

CHAI, YG

LIU, D

HARRIS, JS

机构：

[1] VARIAN ASSOCIATES,CORP RES CTR,PALO ALTO,CA 94303

[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.583375

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：568 / 570

页数：3

共 14 条

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[9] ON THE DESIGN AND CHARACTERIZATION OF A NOVEL ARSINE CRACKING FURNACE UTILIZING CATALYTIC DECOMPOSITION OF ASH3 TO YIELD A PURELY MONOMERIC SOURCE OF ARSENIC FOR MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS [J].

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