SCANNING ELECTRON-BEAM LITHOGRAPHY FOR FABRICATION OF MAGNETIC-BUBBLE CIRCUITS

被引：18

作者：

CHANG, THP ^{[1
]}

HATZAKIS, M ^{[1
]}

WILSON, AD ^{[1
]}

SPETH, AJ ^{[1
]}

KERN, A ^{[1
]}

LUHN, H ^{[1
]}

机构：

[1] IBM CORP, THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1147/rd.204.0376

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：376 / 388

页数：13

共 24 条

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[22] EXPERIMENTAL SCANNING ELECTRON-BEAM AUTOMATIC REGISTRATION SYSTEM
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CHANG, THP
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1240 - 1245
[23] WOLF ED, 1973, P ULTRASONICS S, P510
[24] FABRICATION OF A MINIATURE 8K-BIT MEMORY CHIP USING ELECTRON-BEAM EXPOSURE
YU, HN
DENNARD, RH
CHANG, THP
OSBURN, CM
DILONARDO, V
LUHN, HE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1297 - 1300