GENERATION OF SOFT X-RAYS USING A RARE GAS-HYDROGEN PLASMA-FOCUS AND ITS APPLICATION TO X-RAY-LITHOGRAPHY

被引：116

作者：

KATO, Y ^{[1
]}

BE, SH ^{[1
]}

机构：

[1] RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 11期

关键词：

D O I：

10.1063/1.96743

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：686 / 688

页数：3

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