SECONDARY-ION MASS-SPECTROMETRY AND ITS USE IN DEPTH PROFILING

[31] MATSUMOTO R, 1974, 6 P INT VAC C KYOT

[32] MAUL J, 1974, ADV MASS SPECTROM, V6, P493

[33] MAUL J, TO BE PUBLISHED

[34] ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (04): : 209 - 215

[35] SECONDARY ION EMISSION FOR SURFACE AND IN-DEPTH ANALYSIS OF TANTALUM THIN-FILMS [J]. ANALYTICAL CHEMISTRY, 1973, 45 (06) : 869 - 880

[36] NAGAI K, 1974, 6 P INT VAC C KYOT

[37] SURFACE DAMAGE AND TOPOGRAPHY CHANGES PRODUCED DURING SPUTTERING. [J]. 1600, (18): : 1 - 2

[38] OECHSNER H, TO BE PUBLISHED

[39] IMPURITY DISTRIBUTIONS IN ANODIC FILMS ON TANTALUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (01) : 24 - +

[40] ROUBEROL JM, 1972, 6 P INT C XRAY OPT M, P409

[31] MATSUMOTO R, 1974, 6 P INT VAC C KYOT

[32] MAUL J, 1974, ADV MASS SPECTROM, V6, P493

[33] MAUL J, TO BE PUBLISHED

[34] ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (04): : 209 - 215

[35] SECONDARY ION EMISSION FOR SURFACE AND IN-DEPTH ANALYSIS OF TANTALUM THIN-FILMS [J]. ANALYTICAL CHEMISTRY, 1973, 45 (06) : 869 - 880

[36] NAGAI K, 1974, 6 P INT VAC C KYOT

[37] SURFACE DAMAGE AND TOPOGRAPHY CHANGES PRODUCED DURING SPUTTERING. [J]. 1600, (18): : 1 - 2

[38] OECHSNER H, TO BE PUBLISHED

[39] IMPURITY DISTRIBUTIONS IN ANODIC FILMS ON TANTALUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (01) : 24 - +

[40] ROUBEROL JM, 1972, 6 P INT C XRAY OPT M, P409